Modeling and simulation of the capacitive accelerometer

Inhaltsverzeichnis (Table of Contents)

• Chapter 1: Introduction
• 1.1 Overview of MEMS
• 1.2 Silicon Micro Accelerometers
• 1.2.1 Electromechanical Accelerometers

Zielsetzung und Themenschwerpunkte (Objectives and Key Themes)

This master's thesis aims to model and simulate a capacitive accelerometer. The work focuses on the principles of microelectromechanical systems (MEMS) and their application in accelerometer design.

• Overview of MEMS technology and its applications.
• Detailed explanation of silicon micro-accelerometers and their various types.
• Focus on capacitive and electromechanical accelerometer principles.
• Exploration of micromachining techniques in MEMS fabrication.
• Simulation and modeling aspects of the capacitive accelerometer.

Zusammenfassung der Kapitel (Chapter Summaries)

Chapter 1: Introduction provides a comprehensive overview of MEMS, focusing on their applications and fabrication processes. It details the development of MEMS technology, specifically silicon micromachining, and introduces various types of accelerometers, including electromechanical, piezoelectric, piezoresistive, capacitive, and resonant accelerometers. A detailed explanation of electromechanical accelerometers is included, highlighting their operational principles and advantages.

Schlüsselwörter (Keywords)

Microelectromechanical systems (MEMS), capacitive accelerometer, silicon micromachining, electromechanical accelerometers, modeling, simulation, microfabrication, inertial sensors.