Numerical Approaches To 3D Magnetic MEMS

Inhaltsverzeichnis (Table of Contents)

• Preface
• Abstract
• Chapter 1: Introduction to Magnetic MEMS and Numerical Methods
• 1.1 Motivation and Objectives
• 1.2 Finite Element Method (FEM)
• 1.3 Application to Magnetic MEMS
• Chapter 2: Calculation of Net Body Torque
• 2.1 Methodology
• 2.2 Validation with Ellipsoid
• 2.3 Application to Brick-Shaped Bodies and IRIS Microrobot
• 2.4 Analytical Prediction of Microrobot Torque
• Chapter 3: Magneto-Structural Coupling
• 3.1 Magnetic Resonator
• 3.2 Magnetic Scratch Drive Actuator (MSDA)

Zielsetzung und Themenschwerpunkte (Objectives and Key Themes)

This diploma thesis explores the application of the finite element method (FEM) in the design process of magnetic Micro-Electro-Mechanical-Systems (MEMS). The primary objective is to develop and validate a numerical method for calculating magnetic forces and torques on arbitrarily shaped magnetic bodies, particularly focusing on the challenges of wireless actuation in MEMS.

• Application of FEM to magnetic MEMS design
• Calculation of net body torque on arbitrarily shaped bodies
• Determination of demagnetization factors
• Modeling magneto-structural coupling
• Analytical and numerical modeling comparison

Zusammenfassung der Kapitel (Chapter Summaries)

Chapter 1: This chapter introduces magnetic MEMS and their design challenges, highlighting the limitations of analytical methods and the advantages of using numerical techniques such as FEM. It lays the groundwork for applying FEM to the specific problem of modeling magnetic forces and torques in MEMS.

Chapter 2: This chapter details the proposed method for calculating the net body torque using ANSYS software. It describes the validation process using known analytical results for an ellipsoid and then applies the method to calculate the torque on brick-shaped bodies and the IRIS Microrobot. An analytical prediction method for the microrobot torque is also introduced.

Chapter 3: This chapter focuses on magneto-structural coupling, modeling the motion and deformation of a magnetic body under an external magnetic field. Two case studies are presented: a magnetic resonator and a magnetic scratch drive actuator (MSDA). A quasi-analytical model for the static deflection of the resonator is developed and compared to the FEM results.

Schlüsselwörter (Keywords)

Magnetic MEMS, Finite Element Method (FEM), Magnetic forces and torques, Demagnetization factors, Magneto-structural coupling, Wireless actuation, ANSYS, Microrobot, Magnetic resonator, Magnetic scratch drive actuator (MSDA).